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RTSP1213-PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System

    Buy cheap RTSP1213-PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System from wholesalers
     
    Buy cheap RTSP1213-PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System from wholesalers
    • Buy cheap RTSP1213-PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System from wholesalers
    • Buy cheap RTSP1213-PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System from wholesalers

    RTSP1213-PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System

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    Brand Name : ROYAL
    Model Number : RTSP1200
    Certification : TUV CE
    Price : negotiable
    Payment Terms : L/C, D/A, D/P, T/T
    Supply Ability : 6 sets per month
    Delivery Time : 16 weeks
    • Product Details
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    RTSP1213-PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System

    PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System​


    Why us?

    1. Advanced production machineries (milling, welding,cutting,vacuum leak testing)combined with standardized production procedures and strict tests enable Royal Technology to produce high quality, reliable and low cost coating systems.

    2. Quality, service and on-time delivery are the core principles of Royal technology’s business. A strategy of openly outsourcing simple components to professional manufactures allows us to focus attention to key parts and components R&D, manufacturing.

    3. Strict quality control policies and rigorous selection of qualified suppliers assure Royal Technology’s customers receive the most advanced, high-end quality equipment at the most affordable cost.


    The core technology is how to generate the electrical energy with fuel cell power module through electrochemical reaction between hydrogen as fuel and oxygen.

    Hydrogen fuel cell as the most key important part of the power module, scientists, engineers, professors from transportation organizations and worldwide vehicles manufactures have made thousands tests and finally found the proper processing.

    It is 100% envrionmetally friendly technology and vechiles.


    Our machine RTSP1200 model is exclusively designed and developed for this appliation. We cooperated with Shanghai Jiaotong Unversity and SAIC Motor Corporation Limited Company.


    Hydrogen Fuel Cell Power Module Sputtering System with the PECVD (Plasma Enhanced Chemical Vapor Deposition) Technology to deposit high uniformity, strong adhesion SiC thin films.


    The Hydrogen fuel cell sputtering machine contains ion source, balanced/unblanced sputtering cathodes; with stable and large volume vacuum pumping system.


    Hydrogen Fuel Cell Power Module Sputtering System Specifications


    MODELRTSP1200
    MATERIALStainless Steel (S304)
    CHAMBER SIZEΦ1200*1300mm (H)
    CHAMBER TYPEFront and back 2-doors structure, Vertical
    SINGLE PUMP PACKAGERotary Piston Vacuum Pump
    Roots Vacuum Pump
    Magnetic Suspension Molecular Pump
    Rotary Vane Pump (Holding Pump)
    TECHNOLOGYMagnetron Sputtering, Ion Source PECVD
    POWER SUPPLYSputtering power supply + Bias Power supply + Ion Source
    DEPOSITION SOURCE2 pairs DC/RF Sputtering Cathodes + (2 pairs spare using) + Ion Source
    CONTROLPLC+Touch Screen
    GASGas Mass Flow Meters ( Ar, N2, C2H2, O2) Argon, Nitrogen and Ethyne,Oxygen
    SAFETY SYSTEMNumerous safety interlocks to protect operators and equipment
    COOLINGCooling Water
    CLEANINGGlow Discharge/Ion Source
    POWER MAX.150KW
    AVERAGE POWER CONSUMPTION75KW


    The special designed rack and jig system can take out-move in completely for a substrates convenient loading/unloading.


    Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

    Quality RTSP1213-PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System for sale
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