EMI Shielding Film Deposition Machine, Multifunctional Thermal Evaporation and DC Sputtering Coating System

Summary:

RTEP1616-SPDC Vacuum Metalizing Machine is specially designed for EMI shielding thin film deposition, which widely used in telecommunication devices, computers, notebooks, consumer electronics, home appliance, aerospace and military items.

Our customers are: Sumgsung, Apple, Lenovo, Huawei electronics manufactures.

The chamber size diameter 1600mm and height 1600mm can accommodate a variety of products.

EMI Shielding Film Properties

1) Film thickness : 1.5 ~ 3 microns depends on the requirement.

2) Film resistance: (ohm) better than 0.5Ω

3) Adhesion: 3M810 tape > 5B

EMI shielding film coating process

4) DC Sputtering Stainless Steel

5) Copper deposition by Thermal Evaporation

6) DC Sputtering Stainless Steel, full cover on Cu film layer.

Electro Magnetic Interference Shielding Metalizer Features

1) 2-door structure and fast pumping speed for a high productivity
2) Operating friendly touch screen panel with PLC control

3)Humanity friendly software program design for stable production and high quality.

4) High sputtering target utilization rate ensure a low production cost.

5) Good uniformity & Excellent adhesion

6) Advanced design concept for a better performance to enhance production efficiency and qualified rate.

7) Ion source device for plasma cleaning and surface activity treatment to improve adhesion.

PVD Vacuum Metallizing Advantages:

Finishes are deposited using an environmentally friendly green process, pollution free;
High Efficiency and excellent uniformity.
High volume production, low cost, ideal solution for mass production demand.

EMI Coating Performance

Coating Material: Ni, Cr, Cu, Stainless steel materials.

Film thickness : 1.5 ~ 3 microns depends on the requirement.

Film resistance: (ohm) better than 0.5Ω

Adhesion: 3M810 tape > 5B

Type:

• Vertical orientation, Cylinder, 2-doors structure, front opening.

Technical Specifications:

• Performance

1. Ultimate Vacuum Pressure: better than 5.0×10^-6 Torr.

2. Operating Vacuum Pressure: 1.0×10^-4 Torr

3. Pumping down Time: from 1 atm to 1.0×10^-4 Torr≤5 minutes ( room temperature, dry, clean and empty chamber)

4. Metalizing material ( evaporation): Stainless Steel, Copper

5. Operating Model: Full Automatically /Semi-Auto/ Manually

• Structure

The vacuum coating machine contains key completed system listed below:

1. Vacuum Chamber
1.1 Size: Inner Diameter 1600mm

Inner Height: 1600mm

Useful Height: 1265mm

Total Height: 1420mm

1.2 Materials: Vacuum Chamber SUS304

Door and flanges SUS304

Chamber strengthen structure: SS41 mild steel, with painted finishing surface treatment.

Chamber chassis SS41 mild steel with painted finishing surface treatment.

1.3 Sputtering and Evaporation Shield : SUS304

1.4 View Window: on chamber doors

1.5 Vacuum Chamber Venting Valve (including silencer)

1.6 Door: SUS304 material Diameter 1600mm Inner Height: 1600mm

1.7 Deposition Driving System: Central driving max. 1400mm*1265mm

1.8 Driving Motor: 1/2HP

1.9 Evaporation Power: 1 set/door

DC Sputtering Power: 1 set

Sputtering Cathode size: 125*1400mm

2. Rouhging Vacuum Pumping System

2.1 Oil sealed Rotary Vane Vacuum Pump - Leybold

a: Pumping speed: 640 m³/hr

2.2 Roots Pump - Leybold

a: Pumping speed:4400 m³/hr

2.3 Roughing Vacuum Valve: pneumatic model

2.4 Vacuum Piping Line: 6” & 8” SUS304 material

2.5 Vacuum Venting Valve: 3/8” electromagnetic model

3. High Vacuum Pumping System

3.1 Oil diffusion pump: RTDP-36

a. Pumping speed: 40000L/S

b. Ultimate Vacuum Pressure: better than 10^-7 Torr.

c. Heating Power: 3Phase, 21KW.

d. Oil consumption: 9 liters

3.2 Cold trap: 36” , water cooling against oil stream back

3.3 High Vacuum Valve: pneumatic

3.4 Fore-line Valve: pneumatic

4. Electrical Control and Operation System

4.1 Main circuit: None-fuse breaker switch, electromagnetic switch,
C/T in series type

4.2 Evaporation Power

4.3 Evaporation Control System

4.4 Sputtering Power, DC model

4.5 Control System: PLC +Touch Screen Auto/Manually

4.6 Operation System: Touch Screen + Display

4.7 Vacuum Pressure Measuring System

Vacuum Gauge: Leybold Center Two – 1 set

Full Range Gauge: 760 Torr ~ 10^-7 Torr – 1 set

4.8 Alarm System:

Compressed air pressure is lower: alarm sound

Cooling water flow is lower: alarm sound

Mis-operation: alarm sound

4.9 Power Load Indicator: Voltage indicator and load current indicator

5. Sub-System

5.1 Air Compressed Valve Control System

5.2 Cooling Water System: Water flow pipe and switch valve system

5.3 Polycold (-120~-145℃) Cryopump – 1 set

Model: MaxCool- 2500L

Maximum load:: 2500W

Pumping speed: 14000L/S.

6. Deposition System

6.1 Sputtering Source

a. Sputtering Target” 125mm*1400mm* 12~14mm - 1 set

b. Shutter – 1 set

c. Mass Flow Controller: Ar gas – 1 set

d. Sputtering Power Supply: DC 60KW – 1 set

6.2 Evaporation Sources

a. Tungsten evaporation sources

b. Evaporation Power Supply: 20kVA

c. Ion source device and power supply

• Working Environment

Compressed Air: 5~8kg/cm²

Cooling Water: Water-In Temperature: 20~25℃, 200 Liter/min,
Water-In Pressure: 2~3 kg/cm²

Power: 3 Phase 380V 50Hz(60Hz), 160kVA

Installation Area: (L*W*H) 6500*5500*2700mm

Exhaust: Vent for mechanical pumps

We have been endeavored to design and develop the most suitable coating processes for different 3D parts, which meet our customer production requirements. So we provide total coating solutions for EMI coating.

If customized coating system is required, please share your thoughts and ideas with our team and submit your products specifications, we will work together to sort out the best solutions.

EMI Coating Service is available, the EMI coating machine

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are located in Shanghai and our global network of service centers ensure fast customer service response in key locations.

 Shanghai Royal Technology has a strong drive for innovative design and high quality components selection, combined with an extra careful assembly process and a topnotch team of talented technicians and inventors, which enable us to offer turn-key coating solutions with high standard vacuum equipment, meeting and often exceeding Western standard. We are determined to serve the market worldwide in various industries such as:

Consumer electronics, automotive, renewable energy, architecture, Nano and bio-medical materials.

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Shanghai Royal Technology also successfully designed and developed Cube and Cylinder model large size Aluminum Vacuum Metalizing System which is used for Automotive Logo Board Coating.

     Live Locally, Think Globally is our Vision. We live our day to day business by the concept of “Integrity and Solidarity”, always striving for innovation to achieve win-win situations in our ecosystem of worldwide partners. As pioneers in the Vacuum Coating Equipment Industry, we never relied on previous accomplishments, but we continuously tried to explore the ever changing world of the Vacuum Coating Industry to always create optimal economic, social and environmental benefits for our customers.

ROYAL TECHNOLOGY'S CULTURE

ROYAL's Vision:  to be the worldwide famous brand supplier of providing total solutions to customers requirement.

ROYAL' Mission: protects the environment, saves our blue planet ; to improve labors tough working environment, enhance work efficiency, completely help owners to reduce production cost.

ROYAL's Philosophy: human-oriented, honest, innovative and make the greatest contribution to society.

ROYAL's Value: innovation, advanced technology’s R&D, serving China and worldwide's manufacturing industries.

ROYAL's Service: ONE-STOP service, with excellent technology and products, professional dedication to serve our customers.